SoLayTec supplies equipment for the deposition of an Al2O3 passivating layer onto crystalline solar cells, using spatial Atomic Layer Depostion (ALD). Passivation with Al2O3 results in an absolute efficiency increase of up to 1%. TSCC Technology worked on the mechanical design of both the first Product Development Tools and the next generation High Volume Tools for mass production of up to 3600 wafers per hour.

Furthermore, TSCC Technology made a substantial contribution to the optimization of the revolutionary spatial ALD process, from the proof of concept phase until the double speed process chamber for the High Volume Tool.


In the Spotlight

IHI Hauzer Techno Coating

An inline concept for PVD coating